A step toward calculating the uncertainties in combined GIXRF-XRR
Abstract
The combination of XRR and GIXRF is used for the characterization of thin films and multilayered materials, since both techniques use similar measuring and data analysis procedures and combining them leads to more accurate characterization in terms of thickness, roughness, density and elemental composition. However, there is a major difficulty to determine the associated uncertainties, due to the large number of fitting parameters and more specifically, to the combination of the two methods with dramatically different dynamic ranges.
In this paper, we propose a recursive method for the estimation of the uncertainties of the data from the GIXRF-XRR analysis, based on a Bootstrap statistical method. We applied this method on a one layer chalcogenide GST thin film with a carbon caping layer for which we found small uncertainties on the model parameters. We propose also a method for calculating the uncertainty on the solid angle of the detector based on Monte Carlo simulation.
Keywords
dynamic range
uncertaintiy assessment
Bootstrap statistical method
chalcogenide
carbon caping layer
modelling
detector
Monte Carlo
simulation
particle transport
X-ray reflectivity
grazing incidence X-ray fluorescence
metrology
ionizing radiation
thin film
material characterisation
multilayered material
signal processing
data analysis procedures
measuring procedures
thickness
roughness
density
elemental composition
associated uncertainties
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Origin : Publication funded by an institution
licence : CC BY NC ND - Attribution - NonCommercial - NoDerivatives
licence : CC BY NC ND - Attribution - NonCommercial - NoDerivatives
